| Document Date: 2005-06-08 01:56:12
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City Weinheim / / Company WILEY-VCH Verlag GmbH & Co. KGaA / Introduction Microtechnology / Mold Insert Manufacturing / / Facility Institute of Product Development / University of Karlsruhe / / IndustryTerm micromechanical products / optimum basic solution / microtechnological products / silicon micromechanical systems / information processing / mechanical production technologies / silicon microsystem technology / microsystem technology / process technology / mechanical microproduction technologies / manufacturing technologies / basic partial solutions / chemical and biochemical domains / still realizable manufacturing sizes / analytical and numerical simulation tools / microproduction technologies / manufacturing / tool / technology specification / material / microtechnological systems / technology term / mechanical microproduction technology / chemical and biochemical effects / manufacturing mold inserts / medium-sized and large-batch products / energy / manufacturing microsystems / / Organization University of Karlsruhe / Embodiment Design Unit / Information Unit / Institute of Product Development / / Position designer / methodical trained product development engineer / / Technology Material Spectrum Microsystem technologies / laser / microsystem technology / above-mentioned technologies / mechanical production technologies / mechanical microproduction technologies / mechanical microproduction technology / CAD system / lithography / Production Technology / simulation / technology of integrated circuits / silicon microsystem technology / process technology / microproduction technologies / technology of primary shaping / CAD / /
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I Design Advanced Micro and Nanosystems Vol. 3. Microengineering of Metals and Ceramics. Edited by H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. Korvink, O. Tabata Copyright © 2005 WILEY-VCH Verlag GmbH & Co. KGaA,