![Plasma / Physics / Science / Chemistry / Nanotechnology / Ashing Plasma / Physics / Science / Chemistry / Nanotechnology / Ashing](https://www.pdfsearch.io/img/48e14363ae7abe9da8ef904dc21b151a.jpg) Date: 2012-05-24 09:18:35Plasma Physics Science Chemistry Nanotechnology Ashing | | Cryogenic approaches to low-damage patterning of porous low-k films Francesca Iacopi1,*, Sven Stauss1, Kazuo Terashima1, Mikhail R.Baklanov2 1Dept.ofAdd to Reading ListSource URL: www-leti.cea.frDownload Document from Source Website File Size: 1,81 MBShare Document on Facebook
|