Cryogenic approaches to low-damage patterning of porous low-k films Francesca Iacopi1,*, Sven Stauss1, Kazuo Terashima1, Mikhail R.Baklanov2 1Dept.of - Ashing - Document - PDFSEARCH.IO

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	Cryogenic approaches to low-damage patterning of porous low-k films Francesca Iacopi1,*, Sven Stauss1, Kazuo Terashima1, Mikhail R.Baklanov2 1Dept.of Add to Reading List Document Date: 2012-05-24 09:18:35 Open Document File Size: 1,81 MB Share Result on Facebook City Leuven / / Country Japan / Australia / / / Facility The University of Tokyo / Griffith University / / IndustryTerm gas phase diffusion / plasma processing / porous media / / Organization Griffith University / University of Tokyo / Graduate School / Queensland Micro and Nanotechnology Centre / / SocialTag Plasma Physics Science Chemistry Nanotechnology Ashing

Cryogenic approaches to low-damage patterning of porous low-k films Francesca Iacopi1,*, Sven Stauss1, Kazuo Terashima1, Mikhail R.Baklanov2 1Dept.ofAdd to Reading List