![](https://www.pdfsearch.io/img/4215d863280d40b66e85ba9f5aee5ae3.jpg) Date: 2009-04-20 06:13:55
| | Deposition of SiO2 like films with a miniaturized non thermal atmospheric Pressure Plasma Jet (APPJ) J. Schäfer1, R. Foest1, A. Quade1, A. Ohl1, K. D. Weltmann1 1 INP Greifswald, DGreifswald, Felix-Hausdorff-StrAdd to Reading ListSource URL: www.ejc-pise.orgDownload Document from Source Website File Size: 9,91 KBShare Document on Facebook
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