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Deposition of SiO2 like films with a miniaturized non thermal atmospheric Pressure Plasma Jet (APPJ) J. Schäfer1, R. Foest1, A. Quade1, A. Ohl1, K. D. Weltmann1 1 INP Greifswald, DGreifswald, Felix-Hausdorff-Str
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Document Date: 2009-04-20 06:13:55
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Deposition of SiO2 like films with a miniaturized non thermal atmospheric Pressure Plasma Jet (APPJ) J. Schäfer1, R. Foest1, A. Quade1, A. Ohl1, K. D. Weltmann1 1 INP Greifswald, DGreifswald, Felix-Hausdorff-Str