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Atomic physics / Fluorescence / Molecular physics / Scattering / X-ray fluorescence / Fluorescence spectroscopy / Raman scattering / Stanford Synchrotron Radiation Lightsource / Ionizing radiation / Physics / Chemistry / Spectroscopy


Investigation of Na impurities on Si wafer surfaces using TXRF K. Baur*, A. Singh*, J. Wang+ , J. Kerner++ and P. Pianetta* *Stanford Synchrotron Radiation Laboratory, Stanford University, Stanford, CA 94309 + Balazs Ana
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Document Date: 2003-04-14 02:31:07


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File Size: 58,74 KB

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Pittsburgh / Sunnyvale / Boston / New York / /

Company

Hewlett-Packard Co. / Plenum Press / Thin Solid Films / Balazs Analytical Laboratory / Stanford Synchrotron Radiation Laboratory / /

Event

Product Issues / /

Facility

P. Pianetta* *Stanford Synchrotron Radiation Laboratory / Humboldt Court / Stanford University / Stanford Synchrotron Radiation Laboratory / /

IndustryTerm

incident photon energy / energy region / excitation energy / beam energy / ray energy / transition metal impurities / transition-metal elements / energy / /

Organization

National Science Foundation / Humboldt Court / Stanford University / *Stanford Synchrotron Radiation Laboratory / TXRF K. Baur* / A. Singh* / J. Wang+ / J. Kerner++ and P. Pianetta* *Stanford Synchrotron Radiation Laboratory / Department of Energy / office of Basic Energy Science / /

Person

Ray Spectrometric / /

Product

blanket wafer / /

ProvinceOrState

California / New York / /

SportsLeague

Stanford University / /

Technology

semiconductor / Radiation / X-ray / spectroscopy / integrated circuits / /

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