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Electromagnetism / Microelectromechanical systems / Accelerometer / Surface micromachining / Piezoresistive effect / Industrial etching / Abrasive / Deep reactive-ion etching / Abrasive blasting / Microtechnology / Materials science / Technology
Date: 2007-05-24 07:46:10
Electromagnetism
Microelectromechanical systems
Accelerometer
Surface micromachining
Piezoresistive effect
Industrial etching
Abrasive
Deep reactive-ion etching
Abrasive blasting
Microtechnology
Materials science
Technology

Sensors 2007, 7, [removed]sensors ISSN[removed] © 2007 by MDPI www.mdpi.org/sensors

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