1![Monolithic fabrication of millimeter-scale machines Monolithic fabrication of millimeter-scale machines](https://www.pdfsearch.io/img/66b6b54819154bbab6b0f39d0be684de.jpg) | Add to Reading ListSource URL: micro.seas.harvard.eduLanguage: English - Date: 2012-05-23 11:36:44
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2![VTT MEMSFAB LTD Contract manufacturing of micro- and nanoelectronic devices VTT Memsfab Ltd carries out commercial production of microelectromechanical systems (MEMS) and other micro- and nanoelectronic devices. The com VTT MEMSFAB LTD Contract manufacturing of micro- and nanoelectronic devices VTT Memsfab Ltd carries out commercial production of microelectromechanical systems (MEMS) and other micro- and nanoelectronic devices. The com](https://www.pdfsearch.io/img/66a94f59cd213f3cf05859ccc49e5969.jpg) | Add to Reading ListSource URL: www.vttmemsfab.fiLanguage: English - Date: 2015-01-07 07:29:02
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3![Surface Micromachining An IC-Compatible Sensor Technology Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley Surface Micromachining An IC-Compatible Sensor Technology Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley](https://www.pdfsearch.io/img/389fe1cee1e20c598474e2ddce8405a7.jpg) | Add to Reading ListSource URL: www.hotchips.orgLanguage: English - Date: 2013-07-27 22:47:54
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4![Sensors 2007, 7, [removed]sensors ISSN[removed] © 2007 by MDPI www.mdpi.org/sensors Sensors 2007, 7, [removed]sensors ISSN[removed] © 2007 by MDPI www.mdpi.org/sensors](https://www.pdfsearch.io/img/79d16a09d84ad84b9f717d00ef0276f6.jpg) | Add to Reading ListSource URL: www.mdpi.orgLanguage: English - Date: 2007-05-24 07:46:10
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5![POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie*, Lars Erdmann*, Xu Zhu*, Kaigham J. Gabriel*† and Gary K. Fedder*† * Department of Electrical and Computer Engineering and † POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie*, Lars Erdmann*, Xu Zhu*, Kaigham J. Gabriel*† and Gary K. Fedder*† * Department of Electrical and Computer Engineering and †](https://www.pdfsearch.io/img/959ba4189bf897a30c067b2d6326b9da.jpg) | Add to Reading ListSource URL: www.ece.cmu.eduLanguage: English - Date: 2005-06-13 11:06:39
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6![JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures](https://www.pdfsearch.io/img/f666a9aa03caf4d14fac1268bc39ff30.jpg) | Add to Reading ListSource URL: www.ece.cmu.eduLanguage: English - Date: 2005-06-13 10:40:36
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7![Capabilities Service Details Specific application Capabilities Service Details Specific application](https://www.pdfsearch.io/img/77da37180b30c96324d07551819562e0.jpg) | Add to Reading ListSource URL: www.ipms.fraunhofer.deLanguage: English - Date: 2015-01-15 19:37:11
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8![MEMS & Micro Power Generation (MPG) DARPA Tech 2000 William C. Tang, Ph. D. Program Manager[removed] MEMS & Micro Power Generation (MPG) DARPA Tech 2000 William C. Tang, Ph. D. Program Manager[removed]](https://www.pdfsearch.io/img/bb87ad8c69526d3b5cb23f266f1dfd95.jpg) | Add to Reading ListSource URL: archive.darpa.milLanguage: English - Date: 2000-10-06 09:20:49
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9![CIF2SVG Converter: A Web Publishing Tool for Micromachining and Integrated Circuit Technology Hanjin Cho ([removed]) & Ash M. Parameswaran ([removed]) Institute of Micromachine and Microfabrication Research Schoo CIF2SVG Converter: A Web Publishing Tool for Micromachining and Integrated Circuit Technology Hanjin Cho ([removed]) & Ash M. Parameswaran ([removed]) Institute of Micromachine and Microfabrication Research Schoo](https://www.pdfsearch.io/img/e37b7f155607776d2db983aa01f055de.jpg) | Add to Reading ListSource URL: www.svgopen.orgLanguage: English - Date: 2003-11-07 14:59:31
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10![VTT MEMSFAB LTD Contract manufacturing of micro- and nanoelectronic devices VTT Memsfab Ltd carries out commercial production of microelectromechanical systems (MEMS) and other micro- and nanoelectronic devices. The com VTT MEMSFAB LTD Contract manufacturing of micro- and nanoelectronic devices VTT Memsfab Ltd carries out commercial production of microelectromechanical systems (MEMS) and other micro- and nanoelectronic devices. The com](https://www.pdfsearch.io/img/06c84182a75ad1929b4a5ce338f6cbc1.jpg) | Add to Reading ListSource URL: www.vttmemsfab.fiLanguage: English - Date: 2012-06-07 03:44:53
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