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Technology / Transducers / Semiconductor device fabrication / RF MEMS / Microelectromechanical systems / Microfabrication / Surface micromachining / Micromachinery / Sensor / Microtechnology / Materials science / Nanotechnology


Monolithic fabrication of millimeter-scale machines
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Document Date: 2012-05-23 11:36:44

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File Size: 2,92 MB

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