1![2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) Wollongong, Australia, July 9-12, 2013 Micro-Force Sensor by Active Control of a Comb-Drive Abdenbi Mohand Ousaid, Sinan Haliyo, St´epha 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) Wollongong, Australia, July 9-12, 2013 Micro-Force Sensor by Active Control of a Comb-Drive Abdenbi Mohand Ousaid, Sinan Haliyo, St´epha](https://www.pdfsearch.io/img/23936d627901157e76f2fcc9e9c6cb50.jpg) | Add to Reading ListSource URL: www.cim.mcgill.caLanguage: English - Date: 2013-11-08 17:21:27
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2![This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 1 An Electrostatic Zigzag Transm This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 1 An Electrostatic Zigzag Transm](https://www.pdfsearch.io/img/1e8042703c6ca4754c18081fb586a5c6.jpg) | Add to Reading ListSource URL: www.ee.washington.eduLanguage: English - Date: 2007-01-22 07:55:51
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3![HIGHLY SPACE-EFFICIENT ELECTROSTATIC ZIGZAG TRANSMISSIVE MICRO-OPTIC SWITCHES FOR AN INTEGRATED MEMS OPTICAL DISPLAY SYSTEM Kerwin Wang1, Karl F. Böhringer1, Mike Sinclair2, and Gary Starkweather2 of Washington, Seattle HIGHLY SPACE-EFFICIENT ELECTROSTATIC ZIGZAG TRANSMISSIVE MICRO-OPTIC SWITCHES FOR AN INTEGRATED MEMS OPTICAL DISPLAY SYSTEM Kerwin Wang1, Karl F. Böhringer1, Mike Sinclair2, and Gary Starkweather2 of Washington, Seattle](https://www.pdfsearch.io/img/769438ece18710225a54fcf1cbcc62e3.jpg) | Add to Reading ListSource URL: www.ee.washington.eduLanguage: English - Date: 2003-08-07 23:33:00
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4![LOW VOLTAGE AND PULL-IN STATE ADJUSTABLE DUAL-SERVO-SCANNING-MIRROR Kerwin Wang1, Mike Sinclair2, Karl F. Böhringer1 1 University of Washington, 2Microsoft Research Seattle, WA 98195 LOW VOLTAGE AND PULL-IN STATE ADJUSTABLE DUAL-SERVO-SCANNING-MIRROR Kerwin Wang1, Mike Sinclair2, Karl F. Böhringer1 1 University of Washington, 2Microsoft Research Seattle, WA 98195](https://www.pdfsearch.io/img/a26d1389291bc5af2ca799c0d7dc85fc.jpg) | Add to Reading ListSource URL: www.ee.washington.eduLanguage: English - Date: 2003-02-07 03:34:26
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5![DESIGN, FABRICATION, AND CHARACTERIZATION OF SINGLE CRYSTAL SILICON LATCHING SNAP FASTENERS FOR MICRO ASSEMBLY Rama Prasad Sibley School of Mechanical and Aerospace Engineering DESIGN, FABRICATION, AND CHARACTERIZATION OF SINGLE CRYSTAL SILICON LATCHING SNAP FASTENERS FOR MICRO ASSEMBLY Rama Prasad Sibley School of Mechanical and Aerospace Engineering](https://www.pdfsearch.io/img/9dbcbe792d134144b76b2488968313e9.jpg) | Add to Reading ListSource URL: www.ee.washington.eduLanguage: English - Date: 2003-07-05 01:35:00
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6![MEMS Control Moment Gyroscope Design and Wafer-Based Spacecraft Chassis Study a a MEMS Control Moment Gyroscope Design and Wafer-Based Spacecraft Chassis Study a a](https://www.pdfsearch.io/img/808fe8a6b1e741e636474981846a346a.jpg) | Add to Reading ListSource URL: www.ee.washington.eduLanguage: English - Date: 2003-07-05 01:33:00
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7![LOW -VOLTAGE LARGE ANGULAR DISPLACEMENT ELECTROSTATIC SCANNING MICROMIRROR USING FLOATING SLIDER MECHANISM 1 1 LOW -VOLTAGE LARGE ANGULAR DISPLACEMENT ELECTROSTATIC SCANNING MICROMIRROR USING FLOATING SLIDER MECHANISM 1 1](https://www.pdfsearch.io/img/ef99017d9c44f091f23fe1a64395303a.jpg) | Add to Reading ListSource URL: www.ee.washington.eduLanguage: English - Date: 2003-11-07 11:50:11
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8![POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie*, Lars Erdmann*, Xu Zhu*, Kaigham J. Gabriel*† and Gary K. Fedder*† * Department of Electrical and Computer Engineering and † POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES Huikai Xie*, Lars Erdmann*, Xu Zhu*, Kaigham J. Gabriel*† and Gary K. Fedder*† * Department of Electrical and Computer Engineering and †](https://www.pdfsearch.io/img/959ba4189bf897a30c067b2d6326b9da.jpg) | Add to Reading ListSource URL: www.ece.cmu.eduLanguage: English - Date: 2005-06-13 11:06:39
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9![JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 2, APRIL[removed]Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures](https://www.pdfsearch.io/img/f666a9aa03caf4d14fac1268bc39ff30.jpg) | Add to Reading ListSource URL: www.ece.cmu.eduLanguage: English - Date: 2005-06-13 10:40:36
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10![Dynamic Modeling and Input Shaping for MEMS Dan O. Popa†, John T. Wen†, Harry Stephanou†, George Skidmore‡, Matt Ellis‡ † Center for Automation Technologies, Rensselaer Polytechnic Institute, Troy, New York 1 Dynamic Modeling and Input Shaping for MEMS Dan O. Popa†, John T. Wen†, Harry Stephanou†, George Skidmore‡, Matt Ellis‡ † Center for Automation Technologies, Rensselaer Polytechnic Institute, Troy, New York 1](https://www.pdfsearch.io/img/84e5cc553e15c4f48a15c3d9c2a4aeaf.jpg) | Add to Reading ListSource URL: www.nsti.orgLanguage: English - Date: 2008-11-17 19:32:17
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