Mode Note Scanning Capacitance Microscopy (SCM) High Resolution and High Sensitivity Imaging of Charge Distribution Characterization of Semiconductor Device with Non-Destructive Technique and High Spatial Resolution

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Date: 2009-12-27 18:00:00 Physics Technology MOSFET Capacitance Depletion region Diode P–n junction Capacitor Field-effect transistor Scanning probe microscopy Scanning capacitance microscopy Electromagnetism		Mode Note Scanning Capacitance Microscopy (SCM) High Resolution and High Sensitivity Imaging of Charge Distribution Characterization of Semiconductor Device with Non-Destructive Technique and High Spatial Resolution Add to Reading List Source URL: www.nanowerk.com Download Document from Source Website File Size: 904,57 KB Share Document on Facebook

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