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Ultraviolet radiation / Zinc oxide / Pulsed laser deposition / Electron beam physical vapor deposition / Thin film / Nanoparticle / Sputter deposition / Center of Excellence in Nanotechnology at AIT / Chemistry / Thin film deposition / Semiconductor device fabrication


Applied Mechanics and Materials Vols[removed]pp[removed] © (2014) Trans Tech Publications, Switzerland doi:[removed]www.scientific.net/AMM[removed]Nanocrystalline ZnO films grown by PLD for NO2 and NH3 sensor
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Document Date: 2013-12-09 02:50:32


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Company

Ecopia Corp. / FEI Company / NT-MDT Co. / V.A. Gamaleev A.S. / Thin Solid Films / /

Country

Switzerland / Russia / United States / Netherlands / Korea / /

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Facility

Southern Federal University / /

IndustryTerm

carrier concentration / lower surface energy / reflection high-energy electron diffraction system / metalorganic chemical vapor / gas sensing characteristics / gas/purge lines / detected gas / chemical and thermal stability / gas concentration / gas detecting / reflection high-energy electron diffraction / gas-sensing properties / Metal electrodes / diffuse activation energy / metal oxide sensors / detected gas concentration / exciton binding energy / correct site / gas sensitivity / gas response / gas exposure / non-heated sensor applications / /

Organization

Department of Micro and Nanoelectronics / Southern Federal University / Russian Foundation for Basic Research / /

Person

N. Stefan / V / Evgeny Gennad’evich / E.Y. Gusev / V / G.S. Devi / V / Nova Nanolab / Daniil Evgen / Evgeny Yurievich / Zakhar Evgen / /

Technology

laser / performed using an UV KrF excimer laser / /

URL

www.scientific.net/AMM.475-476.446 / www.ttp.net / /

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