Ecopia Corp. / FEI Company / NT-MDT Co. / V.A. Gamaleev A.S. / Thin Solid Films / /
Country
Switzerland / Russia / United States / Netherlands / Korea / / /
Facility
Southern Federal University / /
IndustryTerm
carrier concentration / lower surface energy / reflection high-energy electron diffraction system / metalorganic chemical vapor / gas sensing characteristics / gas/purge lines / detected gas / chemical and thermal stability / gas concentration / gas detecting / reflection high-energy electron diffraction / gas-sensing properties / Metal electrodes / diffuse activation energy / metal oxide sensors / detected gas concentration / exciton binding energy / correct site / gas sensitivity / gas response / gas exposure / non-heated sensor applications / /
Organization
Department of Micro and Nanoelectronics / Southern Federal University / Russian Foundation for Basic Research / /
Person
N. Stefan / V / Evgeny Gennad’evich / E.Y. Gusev / V / G.S. Devi / V / Nova Nanolab / Daniil Evgen / Evgeny Yurievich / Zakhar Evgen / /
Technology
laser / performed using an UV KrF excimer laser / /