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Ultraviolet radiation / Zinc oxide / Pulsed laser deposition / Electron beam physical vapor deposition / Thin film / Nanoparticle / Sputter deposition / Center of Excellence in Nanotechnology at AIT / Chemistry / Thin film deposition / Semiconductor device fabrication
Date: 2013-12-09 02:50:32
Ultraviolet radiation
Zinc oxide
Pulsed laser deposition
Electron beam physical vapor deposition
Thin film
Nanoparticle
Sputter deposition
Center of Excellence in Nanotechnology at AIT
Chemistry
Thin film deposition
Semiconductor device fabrication

Applied Mechanics and Materials Vols[removed]pp[removed] © (2014) Trans Tech Publications, Switzerland doi:[removed]www.scientific.net/AMM[removed]Nanocrystalline ZnO films grown by PLD for NO2 and NH3 sensor

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