Introduction of Complete Sputtering Metallization in Conjunction with CO2 Snow Lift-Off for High Volume GaAs Manufacturing Fabian Radulescu, Paul Miller, Liam Cunnane*, Mark Harris*, Hien Lam* and Charles Bowers**

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Date: 2010-08-11 21:15:32 Chemistry Technology Coatings Microtechnology Sputtering Evaporation Thin film Lift-off Resist Semiconductor device fabrication Thin film deposition Materials science		Introduction of Complete Sputtering Metallization in Conjunction with CO2 Snow Lift-Off for High Volume GaAs Manufacturing Fabian Radulescu, Paul Miller, Liam Cunnane, Mark Harris, Hien Lam* and Charles Bowers** Add to Reading List Source URL: www.csmantech.org Download Document from Source Website File Size: 60,74 KB Share Document on Facebook

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