GaAsMANTECH Inc. / Trikon Technologies / Sputtered Metal / TriQuint Semiconductor / / /
Facility
Oregon Graduate Institute / /
IndustryTerm
metal deposition method / metal / metal layer / high manufacturing yields / reduced sidewall metal coverage / unwanted metal / batch-style processing / loosened metal / evaporated metal films / in-situ processing steps / snow metal lift-off / evaporated metal / prevalent batch processing technique / metal deposition / metal line / wafer processing / cassette-to-cassette processing / metal films / large consumer electronics / large dome systems / manufacturing line / volume applications / higher kinetic energy flux / cassette-to-cassette cluster metallization tools / /
Organization
Oregon Graduate Institute / /
Person
David Butler / Andy Bavin / Rick Morton / Jerry Mahoney / Paul Miller / Fabian Radulescu / Jack McCarthy / Jeremy Middleton / Jinhong Yang / Liam Cunnane / Mark Harris / Charles Bowers / / /
Introduction of Complete Sputtering Metallization in Conjunction with CO2 Snow Lift-Off for High Volume GaAs Manufacturing Fabian Radulescu, Paul Miller, Liam Cunnane*, Mark Harris*, Hien Lam* and Charles Bowers**