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Thin film deposition / Materials science / Epitaxy / Silicon carbide / Chemical vapor deposition / Doping / Thin film / N-type semiconductor / Semiconductor device / Chemistry / Semiconductor device fabrication / Manufacturing
Date: 2009-03-04 02:31:11
Thin film deposition
Materials science
Epitaxy
Silicon carbide
Chemical vapor deposition
Doping
Thin film
N-type semiconductor
Semiconductor device
Chemistry
Semiconductor device fabrication
Manufacturing

Principal Research Results Establishment of the Base Technology of Large-Capacitance SiC Semiconductor −Development of High Growth Rate and Large-Diameter Epitaxy Technique− Background

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Source URL: criepi.denken.or.jp

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