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Spectroscopy / Emission spectroscopy / Annealing / Silicide / Polycrystalline silicon / Photoemission spectroscopy / High-k dielectric / Absorption spectroscopy / Core electron / Chemistry / Physics / Science


Photon Factory Activity Report 2006 #24 Part BSurface and Interface 2C/2005S2-002 Suppression of silicidation and crystallization by atmosphere controlled annealing
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Document Date: 2010-01-05 10:33:38


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City

Tokyo / /

Country

Japan / /

/

Facility

The University of Tokyo / Photon Factory / /

IndustryTerm

high photon-energy region / mixture gas / low total gas pressure / gas pressure dependence / mixture gas consisting / photon energy / energy resolution / gas annealing / highpurity nitrogen gas / gas pressure / high-purity oxygen gas / mixture gas annealing / energy / /

Organization

High-Energy Accelerator Research Organization / University of Tokyo / Tokyo / Department of Applied 2Chemistry / /

Technology

crystallization / spectroscopy / radiation / dielectric / /

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