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Quartz crystal microbalance / Thin film / Atomic layer epitaxy / Chemical vapor deposition / Alkoxide / Microbalance / Electron beam physical vapor deposition / Semiconductor device fabrication / Oxide / Chemistry / Thin film deposition / Atomic layer deposition
Date: 2013-01-14 08:31:17
Quartz crystal microbalance
Thin film
Atomic layer epitaxy
Chemical vapor deposition
Alkoxide
Microbalance
Electron beam physical vapor deposition
Semiconductor device fabrication
Oxide
Chemistry
Thin film deposition
Atomic layer deposition

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