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Quartz crystal microbalance / Thin film / Atomic layer epitaxy / Chemical vapor deposition / Alkoxide / Microbalance / Electron beam physical vapor deposition / Semiconductor device fabrication / Oxide / Chemistry / Thin film deposition / Atomic layer deposition


väikkäri-4_0Niinisto_Aarik_1_3d.PDF
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Document Date: 2013-01-14 08:31:17


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