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Sensors 2007, 7, [removed]sensors ISSN[removed] © 2007 by MDPI www.mdpi.org/sensors
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Document Date: 2007-05-24 07:46:10

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File Size: 774,33 KB

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Company

Sony / /

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EntertainmentAwardEvent

the platinum film / /

Facility

University of Incheon / Inha University / /

IndustryTerm

lower manufacturing cost / aerospace field / chemical etching processes / error range using metal masks / stainless steel / micro machining technologies / metal mask / Metal masks / important applications / wireless communication fields / control systems / /

Organization

University of Incheon / Korean Society for Precision Engineering / Division of Mechanical Engineering / Inha University / Department of Mechanical Engineering / /

Person

Woo Cho / Bong-Cheol Shin / Jin Yun / /

Position

Author / CaO / /

Technology

semiconductor / micro machining technologies / MEMS technology / MEMS / Silicon Micromachining Technology / MEMS technologies / /

URL

www.mdpi.org/sensors / /

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