Dynamic Modeling and Input Shaping for MEMS Dan O. Popa†, John T. Wen†, Harry Stephanou†, George Skidmore‡, Matt Ellis‡ † Center for Automation Technologies, Rensselaer Polytechnic Institute, Troy, New York 1

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Date: 2008-11-17 19:32:17 Science Electromagnetism Microelectromechanical systems Comb drive Control theory MUMPS State space Heat equation RF MEMS Microtechnology Actuators Technology		Dynamic Modeling and Input Shaping for MEMS Dan O. Popa†, John T. Wen†, Harry Stephanou†, George Skidmore‡, Matt Ellis‡ † Center for Automation Technologies, Rensselaer Polytechnic Institute, Troy, New York 1 Add to Reading List Source URL: www.nsti.org Download Document from Source Website File Size: 241,10 KB Share Document on Facebook

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