Electron beam physical vapor deposition

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31Inorganic compounds / Plasma processing / Oxides / Chemical vapor deposition / Sputter deposition / Electrical resistivity and conductivity / Gallium nitride / Electron beam physical vapor deposition / Thin film / Chemistry / Thin film deposition / Semiconductor device fabrication

Bull. Mater. Sci., Vol. 27, No. 3, June 2004, pp. 295–301. © Indian Academy of Sciences. Studies on tin oxide films prepared by electron beam evaporation and

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Source URL: www.ias.ac.in

Language: English - Date: 2004-06-04 07:52:09
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