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Date: 2013-01-14 08:31:17 Quartz crystal microbalance Thin film Atomic layer epitaxy Chemical vapor deposition Alkoxide Microbalance Electron beam physical vapor deposition Semiconductor device fabrication Oxide Chemistry Thin film deposition Atomic layer deposition		väikkäri-4_0Niinisto_Aarik_1_3d.PDF Add to Reading List Source URL: ethesis.helsinki.fi Download Document from Source Website File Size: 515,51 KB Share Document on Facebook

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