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Electron microscopy / Electron beam / Abrasives / Ceramic materials / Graphene / Electron beam-induced deposition / Electron beam lithography / Boron nitride / Electron microscope / Chemistry / Matter / Superhard materials


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Document Date: 2014-05-21 12:26:50

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Company

Quanta / Ó 2014 Elsevier B.V. / ACS / /

Country

Netherlands / /

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Event

Product Issues / /

Facility

The Netherlands Delft University of Technology / Kavli Institute of Nanoscience / /

IndustryTerm

precursor gas / carrier mobility graphene devices / electronic applications / silicon chip / beam energy / electronics / chemical vapor deposition / e-beam / graphene devices / web version / electron energy / carrier mobility / adsorbed precursor gas / energy / /

Organization

Delft University of Technology / Kavli Institute of Nanoscience / /

Person

R. Erni / G.F. Schneider / V / Michael S. Shur / P. Kruit / V / Nat / Sergey Rumyantsev / Y.S. Bobovich / V / /

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Position

Corresponding author / /

Product

electron beam / /

Technology

laser / silicon chip / spectroscopy / lithography / CVD / chemical vapor deposition / /

URL

http /

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