metal / achievable processing speed / desired physical and chemical properties / chemical synthesis / high energy electrons / chemical reactions / chemical problem / chemical criteria / industrial tool / high-energy electron beam / increase processing speed / chemical principles / multi-electron beam exposure tools / industrial processing tools / chemical composition / chemical properties / pure metal / environmental technology / intense networking / low-energy electron flux / large-scale industrial processing / rapid processing / metal contents / chemical entities / chemical vapour deposition / chemical compounds / high energy / nanoscale devices / microelectromechanical systems / technology promising / industrial processing / low-energy / chemical and physical processes / electron-induced chemical reactions / energy technology / metal organic chemistry / high-tech enterprises / in-line mask repair tools / field operating monitor devices / energy distribution / lab-on-chip / gas phase / low energy secondary electrons / energy / /
Organization
EU FP / US Federal Reserve / Management Committee / COST Committee of Senior officials / Oxford University / /
Position
general research task / leader / General / leader in FEBID technology / /
Technology
semiconductor / microelectromechanical systems / MEMS / X-ray / FEBID technology / energy technology / spectroscopy / 4 EN FEBID technology / lithography / CVD / /
European Cooperation Brussels, 24 May 2013 in the field of Scientific and Technical Research