Supplementary Material for “Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits” C. M. Quintana,1 A. Megrant,1 Z. Chen,1 A. Dunsworth,1 B. Chiaro,1 R. Barends,1

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Date: 2014-08-14 14:18:10 Semiconductor device fabrication Science Thin film deposition Physics Electromagnetism Electron beam lithography Focused ion beam Resonator Electron microscope Materials science Microtechnology Electron microscopy		Supplementary Material for “Characterization and reduction of microfabrication-induced decoherence in superconducting quantum circuits” C. M. Quintana,1 A. Megrant,1 Z. Chen,1 A. Dunsworth,1 B. Chiaro,1 R. Barends,1 Add to Reading List Source URL: web.physics.ucsb.edu Download Document from Source Website File Size: 200,09 KB Share Document on Facebook

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