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Date: 2004-10-27 21:09:24Microtechnology Silicon Microelectromechanical systems Wafer Flip chip Hydrophobe Thermal oxidation Three-dimensional integrated circuit Properties of water Chemistry Semiconductor device fabrication Materials science | Microsoft Word - MEMS05_Fang.docAdd to Reading ListSource URL: www.ee.washington.eduDownload Document from Source WebsiteFile Size: 459,32 KBShare Document on Facebook |
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