Modelling and experiments of a clampedclamped beam MEMS resonator Rob Mestrom 1 , Rob Fey 1 , Joost van Beek 2 , Kim Le Phan 2 , Henk Nijmeijer 1 1

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Date: 2006-10-31 03:46:26		Modelling and experiments of a clampedclamped beam MEMS resonator Rob Mestrom 1 , Rob Fey 1 , Joost van Beek 2 , Kim Le Phan 2 , Henk Nijmeijer 1 1 Add to Reading List Source URL: www.em.tue.nl Download Document from Source Website File Size: 200,15 KB Share Document on Facebook