Modelling and experiments of a clampedclamped beam MEMS resonator Rob Mestrom 1 , Rob Fey 1 , Joost van Beek 2 , Kim Le Phan 2 , Henk Nijmeijer 1 1 - Henk - Document - PDFSEARCH.IO

First Page	Meta Content
	Modelling and experiments of a clampedclamped beam MEMS resonator Rob Mestrom 1 , Rob Fey 1 , Joost van Beek 2 , Kim Le Phan 2 , Henk Nijmeijer 1 1 Add to Reading List Document Date: 2006-10-31 03:46:26 Open Document File Size: 200,15 KB Share Result on Facebook

Modelling and experiments of a clamped­clamped beam MEMS resonator Rob Mestrom 1 , Rob Fey 1 , Joost van Beek 2 , Kim Le Phan 2 , Henk Nijmeijer 1 1 Add to Reading List