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Coatings / Semiconductor device fabrication / Solar cells / Sputter deposition / Titanium dioxide / Thin film / Sputtering / High Power Impulse Magnetron Sputtering / Chemistry / Materials science / Thin film deposition


Pulsed bias effect on roughness of TiO2:Nb films deposited by grid assisted magnetron sputtering
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City

Santa Catarina / Joinville / Campinas / /

Company

Thin Solid Films / Diebold / Fontana LC / Tektronix / Creative Commons / /

Country

Brazil / /

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Facility

Campus Universitário Prof. / Campus Universitário Prof. Avelino Marcante / Federal Institute of Santa Catarina / /

IndustryTerm

technological applications / higher energy bombardment / adhesion clinical applications / stainless steel / stainless steel substrate / kinetic energy / chemical composition / stainless steel vacuum vessel / higher energy / homemade device / physical-chemical properties / energy / /

Organization

Federal Institute of Santa Catarina / /

Person

Avelino Marcante / Paulo Malschitzki / Julio César / Abel André Cândido / /

Position

author / /

ProvinceOrState

South Carolina / /

Technology

alpha / radiation / Av / s/n / X-Ray / /

URL

http /

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