Physics of High Power Impulse Magnetron Sputtering André Anders1*, Joakim Andersson1, David Horwat1, and Arutiun Ehiasarian2 1 Lawrence Berkeley National Laboratory, University of California, 1 Cyclotron Road, Berkeley,

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Date: 2014-12-11 20:17:14 Semiconductor device fabrication Thin film deposition Plasma physics Coatings Materials science Sputter deposition Sputtering Plasma Mass spectrometry Chemistry Physics Science		Physics of High Power Impulse Magnetron Sputtering André Anders1*, Joakim Andersson1, David Horwat1, and Arutiun Ehiasarian2 1 Lawrence Berkeley National Laboratory, University of California, 1 Cyclotron Road, Berkeley, Add to Reading List Source URL: eetd.lbl.gov Download Document from Source Website File Size: 411,54 KB Share Document on Facebook

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