Back to Results
First PageMeta Content
Semiconductor device fabrication / Thin film deposition / Plasma physics / Coatings / Materials science / Sputter deposition / Sputtering / Plasma / Mass spectrometry / Chemistry / Physics / Science


Physics of High Power Impulse Magnetron Sputtering André Anders1*, Joakim Andersson1, David Horwat1, and Arutiun Ehiasarian2 1 Lawrence Berkeley National Laboratory, University of California, 1 Cyclotron Road, Berkeley,
Add to Reading List

Document Date: 2014-12-11 20:17:14


Open Document

File Size: 411,54 KB

Share Result on Facebook

City

Berlin / Cannes / Boston / San Diego / New York / /

Company

Pearson / HIDEN Ltd. / Renewable Energy / Thin Solid Films / Melec GmbH / Tektronix / Arutiun Ehiasarian2 1 Lawrence Berkeley National Laboratory / monitored using a Pearson™ current transformer / /

Country

France / Japan / /

/

EntertainmentAwardEvent

Cannes / /

Facility

Building Technology / Sheffield Hallam University / Engineering Research Institute / University of California / /

IndustryTerm

metal / local gas density decreases / process gas / gas density ng / stored energy / energy distribution function / atom-gas combinations / energy perpendicular / similar gas / kinetic energy / atom-gas collision / metal character / ionized metal / energy range / energy analyzer / background gas pressure / pure argon gas / cathodic arc plasma processing / potential energy / gas temperature / metal plasma evolution / argon gas / gas equation / gas density / metal plasma / higher kinetic energy / metal ions / ionization energy / metal starts / energy / /

Organization

office of Building Technology / Congress / University of California / U.S. Department of Energy / Materials and Engineering Research Institute / Berkeley Lab / Sheffield Hallam University / /

Person

Sergey Bugaev / /

Position

collector / Assistant Secretary / ion collector / corresponding author / /

ProvinceOrState

Pennsylvania / /

Technology

semiconductor / spectroscopy / simulation / /

URL

http /

SocialTag