![Institute of Environmental Sciences and Technology / Chemistry / Air Movement and Control Association / Cleanroom / HEPA / Contamination control / Filters / Chemical engineering / Prevention Institute of Environmental Sciences and Technology / Chemistry / Air Movement and Control Association / Cleanroom / HEPA / Contamination control / Filters / Chemical engineering / Prevention](https://www.pdfsearch.io/img/854f2e5c36dc1c51c19f1534756b3cc4.jpg) Date: 2014-12-11 20:16:39Institute of Environmental Sciences and Technology Chemistry Air Movement and Control Association Cleanroom HEPA Contamination control Filters Chemical engineering Prevention | | Toward Green Systems for Cleanrooms: Energy Efficient Fan-filter Units Ming-Shan Jeng, Industrial Technology Research Institute, [removed] Tengfang Xu, Lawrence Berkeley National Laboratory, [removed] Chao-HoAdd to Reading ListSource URL: eetd.lbl.govDownload Document from Source Website File Size: 350,73 KBShare Document on Facebook
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