Toward Green Systems for Cleanrooms: Energy Efficient Fan-filter Units Ming-Shan Jeng, Industrial Technology Research Institute, [removed] Tengfang Xu, Lawrence Berkeley National Laboratory, [removed] Chao-Ho

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Date: 2014-12-11 20:16:39 Institute of Environmental Sciences and Technology Chemistry Air Movement and Control Association Cleanroom HEPA Contamination control Filters Chemical engineering Prevention		Toward Green Systems for Cleanrooms: Energy Efficient Fan-filter Units Ming-Shan Jeng, Industrial Technology Research Institute, [removed] Tengfang Xu, Lawrence Berkeley National Laboratory, [removed] Chao-Ho Add to Reading List Source URL: eetd.lbl.gov Download Document from Source Website File Size: 350,73 KB Share Document on Facebook

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