Lawrence Berkeley National Laboratory / Renewable Energy / Recommendations Laboratory / Control Association International Inc. / IEST Working Group / Conclusions / Semiconductor Manufacturing / /
Country
United States / / /
Facility
ITRI’s laboratory / Laboratory Evaluation / Laboratory Method / The Institute of Environmental Sciences / Building Technology / Industrial Technology Research Institute / Institute of Environmental Sciences / ITRI’s facility / Laboratory Methods / LBNL laboratory / Laboratory Measurements / /
IndustryTerm
fan systems / electricity / considerable energy / bank / cleanroom applications / energy performance / energy performance index / air recirculation systems / energy use / energy efficiency / energy / /
Organization
U.S. Department of Energy / Institute of Environmental Sciences and Technology / SEMI / Industrial Technology Research Institute / /
Toward Green Systems for Cleanrooms: Energy Efficient Fan-filter Units Ming-Shan Jeng, Industrial Technology Research Institute, [removed] Tengfang Xu, Lawrence Berkeley National Laboratory, [removed] Chao-Ho