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Date: 2012-05-23 11:36:44Technology Transducers Semiconductor device fabrication RF MEMS Microelectromechanical systems Microfabrication Surface micromachining Micromachinery Sensor Microtechnology Materials science Nanotechnology | Monolithic fabrication of millimeter-scale machinesAdd to Reading ListSource URL: micro.seas.harvard.eduDownload Document from Source WebsiteFile Size: 2,92 MBShare Document on Facebook |