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Photolithography / Semiconductor device fabrication / Photoresist / Resist / Interference lithography / Fraunhofer Society / Ultraviolet / Simulation / Computational lithography / Materials science / Microtechnology / Chemistry


FRAUNHOFER INSTI TUTE FOR I NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB General Description Dr.LiTHO is a comprehensive simulation environment for photolithography developed at Fraunhofer IISB. Its main focus is on de
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Document Date: 2015-06-08 13:42:32


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IndustryTerm

proximity printing / photolithography systems / chemical reaction kinetics / evaluation tools / /

OperatingSystem

Linux / /

Position

NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB General / /

ProgrammingLanguage

Python / /

Technology

lithography / photolithography / simulation / Linux / /

SocialTag