Toggle navigation
PDFSEARCH.IO
Document Search Engine - browse more than 18 million documents
Sign up
Sign in
Back to Results
First Page
Meta Content
View Document Preview and Link
FRAUNHOFER INSTI TUTE FOR I NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB General Description Dr.LiTHO is a comprehensive simulation environment for photolithography developed at Fraunhofer IISB. Its main focus is on de
Add to Reading List
Document Date: 2015-06-08 13:42:32
Open Document
File Size: 363,34 KB
Share Result on Facebook
IndustryTerm
proximity printing /
photolithography systems /
chemical reaction kinetics /
evaluation tools /
/
OperatingSystem
Linux /
/
Position
NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB General /
/
ProgrammingLanguage
Python /
/
Technology
lithography /
photolithography /
simulation /
Linux /
/
SocialTag
Photolithography
Semiconductor device fabrication
Photoresist
Resist
Interference lithography
Fraunhofer Society
Ultraviolet
Simulation
Computational lithography
Materials science