FRAUNHOFER INSTI TUTE FOR I NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB General Description Dr.LiTHO is a comprehensive simulation environment for photolithography developed at Fraunhofer IISB. Its main focus is on de

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Date: 2015-06-08 13:42:32 Photolithography Semiconductor device fabrication Photoresist Resist Interference lithography Fraunhofer Society Ultraviolet Simulation Computational lithography Materials science Microtechnology Chemistry		FRAUNHOFER INSTI TUTE FOR I NTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB General Description Dr.LiTHO is a comprehensive simulation environment for photolithography developed at Fraunhofer IISB. Its main focus is on de Add to Reading List Source URL: www.iisb.fraunhofer.de Download Document from Source Website File Size: 363,34 KB Share Document on Facebook

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