![Technology / Nanoimprint lithography / Polycrystalline silicon / Silicon / Wafer / Gas immersion laser doping / Laser / Excimer laser / Ion laser / Chemistry / Semiconductor device fabrication / Materials science Technology / Nanoimprint lithography / Polycrystalline silicon / Silicon / Wafer / Gas immersion laser doping / Laser / Excimer laser / Ion laser / Chemistry / Semiconductor device fabrication / Materials science](https://www.pdfsearch.io/img/928ca7e94e91d755bcc966718eb058b8.jpg) Date: 2006-08-19 16:37:09Technology Nanoimprint lithography Polycrystalline silicon Silicon Wafer Gas immersion laser doping Laser Excimer laser Ion laser Chemistry Semiconductor device fabrication Materials science | | letters to nature .............................................................. Ultrafast and direct imprint of nanostructures in silicon Stephen Y. Chou*, Chris Keimel & Jian GuAdd to Reading ListSource URL: www.princeton.eduDownload Document from Source Website File Size: 253,53 KBShare Document on Facebook
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