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Physics / Microtechnology / Plasma processing / Spectroscopy / Nanotechnology / Etching / Dry etching / Reactive-ion etching / Polymer / Semiconductor device fabrication / Chemistry / Materials science


Hindawi Publishing Corporation Journal of Nanomaterials Volume 2013, Article ID[removed], 6 pages http://dx.doi.org[removed][removed]Review Article
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Document Date: 2014-08-28 12:52:18

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File Size: 3,16 MB

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City

Fluorine / /

Company

IBM / Volume 2014 Hindawi Publishing Corporation / Surface Technology Systems / Volume 2014 The Scientific World Journal Hindawi Publishing Corporation / B. Ji S. A. / Polymer Science Volume 2014 Hindawi Publishing Corporation / Materials Hindawi Publishing Corporation / Volume 2014 Smart Materials Research Hindawi Publishing Corporation / Creative Commons / Philips / Thin Solid Films / Biomaterials Volume 2014 Hindawi Publishing Corporation / National Electronics / Nanoparticles Hindawi Publishing Corporation / Volume 2014 Nanomaterials Hindawi Publishing Corporation / Corrosion Hindawi Publishing Corporation / Scientifica Hindawi Publishing Corporation / Hindawi Publishing Corporation / Crystallography Volume 2014 Hindawi Publishing Corporation / Textiles Ceramics Hindawi Publishing Corporation / Composites Volume 2014 Hindawi Publishing Corporation / Engineering Hindawi Publishing Corporation / Nanoscience Hindawi Publishing Corporation / Nanotechnology Hindawi Publishing Corporation / Metallurgy BioMed Research International Hindawi Publishing Corporation / Coatings Volume 2014 Hindawi Publishing Corporation / /

Currency

CHF / /

/

Facility

King Mongkut’s Institute of Technology Ladkrabang / National Research University / Industry/University Cooperative Research Center / Pumping port / Maejo University / King Mongkut’s University of Technology Thonburi / /

IndustryTerm

chemical solution / multilevel interconnect applications / reactive gas / alcohol-based solution / suitable technology / gas type / chemical reaction / energy / by-products / chemical reactions / semiconductor manufacturing / gas flow rate / chemical bonding state / correct chemical bonding data / reaction by-products / gas-surface chemistry / chemical etching / chemical bonding results / gas flow rate settings / gas chemistry / random network / /

Organization

Faculty of Science / King Mongkut’s Institute of Technology Ladkrabang / Industry/University Cooperative Research Center / Commission of Higher Education / Department of Physics / Thailand Division of Material Science / Maejo University / Technology Development Agency / King Mongkut’s University of Technology Thonburi / Bangkok / National Research University / /

Person

F. L. Freire Jr. / Alonggot Limcharoen / ATR FTIR / Mark Moravec / Ray Photoelectron / Raman Spectroscopy / H. Maia da Costa / /

Position

slider head / recording head / Academic Editor / magnetic recording head / /

Product

CF4 / C4 F8 / /

ProgrammingLanguage

DC / /

PublishedMedium

Japanese Journal of Applied Physics / Journal of Applied Physics / Journal of Physical Chemistry A / /

Technology

semiconductor / X-ray / disk drive / lithography / photolithography / laser / dielectric / condensation / spectroscopy / http / radio frequency / /

URL

http /

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