conventional nano-scale devices / chemical imaging / Elemental devices / element-selective imaging / Site-specific chemical-state analyses / chemical states / metaloxide-semiconductor devices / energy-band discontinuity / chemical images / /
Organization
High Energy Accelerator Research Organization / University of Tokyo / Tokyo / Synchrotron Radiation Research Organization / Department of Applied Chemistry / /
Photon Factory Activity Report 2010 #28 Part BSurface and Interface 16A/2008U-004 Nano-scale characterization of poly-Si gate on high-k gate stack structures by