Shallow trench isolation

#	Item
1	Photon Factory Activity Report 2010 #28 Part BSurface and Interface 16A/2008U-004 Nano-scale characterization of poly-Si gate on high-k gate stack structures by Add to Reading List Source URL: pfwww.kek.jp Language: English - Date: 2012-01-30 04:32:45 Technology Crystals Polycrystalline silicon Nanotechnology Photoemission spectroscopy Shallow trench isolation Etching Semiconductor device fabrication Materials science Microtechnology
2	PROJECT RESULT IC technology integration T201: CMOS logic 0.1 µm and below (CMOS logic 0.1µm) Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:39:33 Electronic design Logic families CMOS 65 nanometer IMEC Shallow trench isolation Electronic engineering Electronics Semiconductor device fabrication
3	SIMTech Technical Report (PT[removed]JT) Chemical Mechanical Planarization Add to Reading List Source URL: maltiel-consulting.com Language: English - Date: 2013-04-20 18:07:00 Technology Chemical-mechanical planarization Copper interconnect Microelectromechanical systems Etching Surface finishing Surface micromachining Shallow trench isolation Photolithography Semiconductor device fabrication Materials science Microtechnology