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Surface chemistry / Porous media / Scattering / Materials science / Porosimetry / Adsorption / Desorption / Porosity / Kelvin equation / Chemistry / Physical chemistry / Physics


2998 Macromolecules 2006, 39, [removed]SANS and XRR Porosimetry of a Polyphenylene Low-k Dielectric Michael S. Silverstein*
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Document Date: 2006-04-13 10:24:47


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National Institute of Standards and Technology / Polyphenylene Low-k Dielectric Michael S. Silverstein* Department of Materials Engineering / Semiconductor Industry Association / National Science Foundation / Polymers Division / US Department of Commerce / Department of Materials Science and Engineering / J. Bauer / * Ronald C. Hedden / † and Hae-Jeong Lee Polymers DiVision / Oxford University / Israel Institute of Technology / Penn State University / Technion / Center for Neutron Research / /

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Christopher L. Soles / Simon / Barry J. Bauer / Ronald C. Hedden / Wei Liu / Michael S. Silverstein / Derek L. Ho / Lucero / Perry / /

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