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646 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 36. NO. 4, APRIL 1989 A Recessed-Gate In,.52A10.48As/n+-1%.53G%. 4 7 A ~ MIS-type FET
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Document Date: 2013-04-16 14:15:15


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gate-length device / chemical etchant / heterostructure devices / minority-carrier transport / present devices / frequency applications / gate metal deposition / energy difference / portant manufacturing advantages / energy / undoped-cap devices / recessed-gate device / telecommunications / Device processing / e-beam / gate-length devices / gate device / functional devices / extrinsic device / gate metal evaporation / /

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