![Microtechnology / Microelectromechanical systems / Wafer / Chemical vapor deposition / Deep reactive-ion etching / Stepper / Reactive-ion etching / Plasma etcher / Sputtering / Semiconductor device fabrication / Materials science / Technology Microtechnology / Microelectromechanical systems / Wafer / Chemical vapor deposition / Deep reactive-ion etching / Stepper / Reactive-ion etching / Plasma etcher / Sputtering / Semiconductor device fabrication / Materials science / Technology](https://www.pdfsearch.io/img/1d69a40995174f19149a5151ff66aeb2.jpg)
| Document Date: 2012-11-20 13:15:45 Open Document File Size: 44,40 KBShare Result on Facebook
City Cambridge / / Company Primaxx SPTS uEtch HF / Ge / Lam Research / Semigroup / / Currency pence / / Facility Disco DAD3240 Automatic Dicing Saw / / IndustryTerm carrier wafer / proper carrier wafer / wafer processing / pre-furnace metal clean sink / capable need hardware / metal etch chamber / / Organization Substrates Equipment Description Chapter / Nuclear Regulatory Commission / / Person Karl Suss Wafer Bonder / Karl Suss Bond Aligner / Nova NanoSEM / Karl Suss Mask / Ray Diffractometer / / Position cpa / General / polishing head / cpa CPA / / ProgrammingLanguage DC / / Technology Lithography / MEMS / lithography system / CVD / cmp / /
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