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Technology / Etching / Reactive-ion etching / Isotropy / Microelectromechanical systems / Dry etching / Semiconductor device fabrication / Microtechnology / Materials science


Dry EtchOct2011.qxp:44 AM
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Document Date: 2011-10-14 10:04:12


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File Size: 1,38 MB

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City

Andover / /

Company

MKS Instruments Inc. / MA. Dry Etch Process Solutions / /

Country

United States / /

Event

Reorganization / /

IndustryTerm

process control solutions / telephone support / technology set / purge gas delivery systems / process applications / selective dry chemical etching / measurement devices / etch technology / control systems / information management / manufacturing / value solutions / gas composition monitoring / technology leadership / reactive gas generation / technology combines / dry etch systems / vacuum technology / /

Person

Ion Etching / /

/

Position

worldwide leader in the development / /

Product

628D Baratron / /

ProvinceOrState

Massachusetts / /

Technology

semiconductor / turbulent pumpdowns Dry etch technology / vacuum technology / condensation / process control / integrated circuits / /

URL

www.mksinst.com / /

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