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| Document Date: 2009-03-25 10:37:04 Open Document File Size: 87,08 KBShare Result on Facebook
Company Philips / STMicroelectronics / / Continent Europe / / / Facility ALCVD reactor / / / IndustryTerm separate gas-phase precursors / cluster tool / inlaid metal / adequate device / gas flow / chemical treatment / low power devices / nm devices / conventional tor technology / conventional chemical deposition / equipment supplier / production-ready tools / metal deposition / / Organization Information Society / MEDEA+ Office / / Person Ir / Ivo J. Raaijmakers / / / Position Project leader / leader / co-operative / / PublishedMedium the Information Society / / Technology semiconductor / conventional tor technology / CVD / dielectric / integrated circuit / / URL http /
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