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Micromachinery
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#	Item
1	Monolithic fabrication of millimeter-scale machines Add to Reading List Source URL: micro.seas.harvard.edu Language: English - Date: 2012-05-23 11:36:44 Technology Transducers Semiconductor device fabrication RF MEMS Microelectromechanical systems Microfabrication Surface micromachining Micromachinery Sensor Microtechnology Materials science Nanotechnology
2	Micromachine Center MEMS Industry Forum 17th World Micromachine Summit 2011 at Ras Al Khaimah, UAE Networking & Promotion Add to Reading List Source URL: www.mmc.or.jp Language: English - Date: 2012-06-01 02:17:21 Microelectromechanical systems RF MEMS Micromachinery Semiconductor Equipment and Materials International Accelerometer Microtechnology Materials science Technology
3	Surface Micromachining An IC-Compatible Sensor Technology Bernhard E. Boser Berkeley Sensor & Actuator Center Dept. of Electrical Engineering and Computer Sciences University of California, Berkeley Add to Reading List Source URL: www.hotchips.org Language: English - Date: 2013-07-27 22:47:54 Transducers Engineering Sensors Electrical engineering Mechanical engineering Microelectromechanical systems Accelerometer Micromachinery Gyroscope Microtechnology Technology Materials science
4	182 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 11, NO. 3, JUNE 2002 Sub-10 cm3 Interferometric Accelerometer With Nano-g Resolution Add to Reading List Source URL: manalis-lab.mit.edu Language: English - Date: 2011-02-10 14:18:34 Materials science Transducers Accelerometers Nanotechnology Microelectromechanical systems Micromachinery Ambient Vibrations Gravitational wave Sensor Technology Microtechnology Physics
5	Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, 2001, New York, NY OMNIDIRECTIONAL WALKING MICROROBOT REALIZED BY THERMAL MICROACTUATOR ARRAYS Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2001-08-22 14:51:00 Technology Microbotics Microelectromechanical systems Micromachinery Robotics Valve actuator Microtechnology Materials science Actuators
6	A THEORY OF MANIPULATION AND CONTROL FOR MICROFABRICATED ACTUATOR ARRAYS Karl-Friedrich Bohringer Bruce R. Donald Robotics & Vision Laboratory Department of Computer Science Cornell University Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:38:00 Nanotechnology Technology Robotics Microfabrication Microelectromechanical systems Micromachinery Microtechnology Materials science Actuators
7	[removed]A DOCKING SYSTEM FOR MICROSATELLITES BASED ON MEMS ACTUATOR ARRAYS* David M. Meller Joel Reiter, Mason Terry, Karl F. Böhringer, Ph.D., Mark Campbell, Ph.D Department of Electrical Engineering Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2001-02-06 21:45:00 Microtechnology Actuators Spacecraft docking and berthing mechanisms Microelectromechanical systems Micromachinery Valve actuator Robotics International Space Station Space rendezvous Spaceflight Technology Spacecraft
8	Vector Fields for Task-level Distributed Manipulation: Experiments with Organic Micro Actuator Arrays Karl-Friedrich Bohringer1;, John W. Suh2, Bruce Randall Donald1;3, Gregory T. A. Kovacs2 1 Robotics & Vision Lab, De Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:05:00 Mathematics Actuators Electrical engineering Transducers Nanotechnology Robotics Vector Microelectromechanical systems Micromachinery Algebra Physics Microtechnology
9	INSTITUTE OF PHYSICS PUBLISHING SMART MATERIALS AND STRUCTURES Smart Mater. Struct[removed]–1184 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-04 23:46:00 Materials science Technology Microelectromechanical systems Valve actuator Micromachinery Robotics Spacecraft docking and berthing mechanisms Cilium International Space Station Spaceflight Microtechnology Actuators
10	. THEME ARTICLE Computational Methods for Design and Control of MEMS Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 00:47:00 Technology Transducers Electromagnetism Nanotechnology Electrical engineering Microelectromechanical systems Vector Micromachinery Microtechnology Materials science Actuators

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