F r a u n h o f e r I n s t i t u t e f o r I n t e g r at e d S y s t e m s a n d D e v i c e T e c h n o l o g y 1 1

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Date: 2015-06-08 13:40:47 Technology Wafer Silicon carbide Fraunhofer Society Reliability Micropipe Semiconductor device fabrication Materials science Chemistry		F r a u n h o f e r I n s t i t u t e f o r I n t e g r at e d S y s t e m s a n d D e v i c e T e c h n o l o g y 1 1 Add to Reading List Source URL: www.iisb.fraunhofer.de Download Document from Source Website File Size: 324,05 KB Share Document on Facebook