F r a u n h o f e r I n s t i t u t e f o r I n t e g r at e d S y s t e m s a n d D e v i c e T e c h n o l o g y 1 1 - Micropipe - Document - PDFSEARCH.IO

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	F r a u n h o f e r I n s t i t u t e f o r I n t e g r at e d S y s t e m s a n d D e v i c e T e c h n o l o g y 1 1 Add to Reading List Document Date: 2015-06-08 13:40:47 Open Document File Size: 324,05 KB Share Result on Facebook Company Integrated Systems / / / Facility Fraunhofer Institute / / / IndustryTerm mechatronic systems / manufacturing equipment / sensor devices / power semiconductor devices / prototype devices / value chain / voltage devices / in-house technology / power electron devices / / Organization Fraunhofer Institute / / Person Kurt Fuchs / Tobias Erlbacher / / / Technology simulation / process control / Photolithography / semiconductor devices / in-house technology / dielectric / pilot line Device Technology / / URL www.iisb.fraunhofer.de/sic / / SocialTag Technology Wafer Silicon carbide Fraunhofer Society Reliability Micropipe Semiconductor device fabrication Materials science Chemistry

F r a u n h o f e r I n s t i t u t e f o r I n t e g r at e d S y s t e m s a n d D e v i c e T e c h n o l o g y 1 1Add to Reading List