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Manufacturing / Thin film deposition / Superhard materials / Electron beam / Electron beam induced current / Silicon carbide / Fraunhofer Society / Epitaxy / Micropipe / Chemistry / Semiconductor device fabrication / Materials science
Date: 2015-06-08 13:41:42
Manufacturing
Thin film deposition
Superhard materials
Electron beam
Electron beam induced current
Silicon carbide
Fraunhofer Society
Epitaxy
Micropipe
Chemistry
Semiconductor device fabrication
Materials science

F r a u n h o f e r I n s t i t u t e f o r I n t e g r at e d S y s t e m s a n d D e v i c e T e c h n o l o g y 1 2

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